Product  line-up

Plasma  CVD  System

  

                    Model  No.                                                       Deposition  film                                                          Wafer  size                                         Purpose

                  VDS-5800SNC                                  SiN/SiO2/SiON/a-Si/TEOS/PSG/BPSG                       ~150mm                                 R&D,  Trial  mass  production,  
                                                                                                                                                                                                                                                          Mass production line

                  VDS-5800SNC-L                              SiN/SiO3/SiON/a-Si/TEOS/PSG/BPSG                       ~200mm                                 Mass prodiction line

                  VDS-5700                                            SiN/SiO5/SiON/a-Si/TEOS/PSG/BPSGG                    ~150mm                                 R&D